Prototyping of Silicon Nitride Photonic Integrated Circuits using Electron Beam Lithography Conferences uri icon

  •  
  • Overview
  •  
  • Research
  •  
  • Identity
  •  
  • Additional Document Info
  •  
  • View All
  •  

authors

  • Horvath, Cameron
  • Westwood-Bachman, Jocelyn N
  • Setzer, Kevin
  • Naraine, Cameron M
  • Mbonde, Hamidu M
  • Frare, Bruno L Segat
  • Bradley, Jonathan
  • Aktary, Mirwais

publication date

  • May 24, 2022