Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000x1000-Port Optical Crossconnect Conferences uri icon

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authors

  • Gasparyan, A
  • Shea, H
  • Arney, S
  • Aksyuk, V
  • Simon, ME
  • Pardo, F
  • Chan, HB
  • Kim, J
  • Gates, J
  • Kraus, JS
  • Goyal, S
  • Carr, D
  • Kleiman, Rafael

publication date

  • January 1, 2003