Conference
Photoluminescence Evolution of Silicon Carbonitride Thin Films Grown by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapour Deposition
Authors
Khatami Z; Wilson PRJ; Wojcik J; Mascher P
Pagination
pp. 319-324
Publisher
Society of Vacuum Coaters
Publication Date
January 1, 2014
DOI
10.14332/svc13.proc.1110
Name of conference
Society of Vacuum Coaters 56th (2013) Annual Technical Conference Proceedings
ISSN
0737-5921