Journal article
Sequential Plasma Activation Process for Silicon Direct Bonding
Authors
Howlader MR; Itoh H; Suga T; Kim M
Journal
ECS Meeting Abstracts, Vol. MA2006-02, No. 30, pp. 1368–1368
Publisher
The Electrochemical Society
Publication Date
June 30, 2006
DOI
10.1149/ma2006-02/30/1368
ISSN
2151-2043