Journal article
A Model for the Critical Height for Dislocation Annihilation and Recombination in GaN Columns Deposited by Patterned Growth
Abstract
In order to reduce vertical leakage in III-nitride detectors, we have grown a patterned array of hexagonal GaN columns on masked heteroepitaxial GaN template layers using a-plane sapphire substrates. In addition to eliminating cracking, we have found that for GaN columns tens of microns in diameter and several microns high, the dislocation density is also significantly reduced. We have developed a simple closed-form analytical model for …
Authors
Twigg ME; Bassim ND; Eddy CR; Henry RL; Holm RT; Mastro MA
Journal
MRS Advances, Vol. 831, No. 1, pp. 150–157
Publisher
Springer Nature
Publication Date
2004
DOI
10.1557/proc-831-e11.29
ISSN
2731-5894