UV-written silicon nitride integrated optical phased arrays Conferences

authors

• Ilie, Stefan T
• De Paoli, Greta
• Flint, Alexander
• Dominguez Bucio, Thalia
• Ginel-Moreno, Pablo
• Sagar, Jaya
• Ortega-Monux, Alejandro
• Lekkas, Konstantinos
• Rutirawut, Teerapat
• Mastronardi, Lorenzo
• Skandalos, Ilias
• Molina Fernández, Iñigo
• Kanellos, George T
• Cheben, Pavel
• Smith, Peter GR
• Gates, James
• Gardes, Frederic Y

status

• published 

publication date

• March 5, 2022

published in

• Proceedings of SPIE - The International Society for Optical Engineering  Journal

presented at event

• Smart Photonic and Optoelectronic Integrated Circuits 2022  Conference

keywords

• ANTENNA
• Engineering
• Engineering, Electrical & Electronic
• Optical phased array
• Optics
• Physical Sciences
• Science & Technology
• Silicon Nitride
• Technology
• UV laser exposure

Digital Object Identifier (DOI)

• 10.1117/12.2608824

International Standard Book Number (ISBN) 13

• 978-1-5106-4881-4

volume

• 12005