Novel x-ray mask structure with low out-of-plane distortion Conferences

authors

• Jeon, Young Jin
• Choi, Sang-Soo
• Kim, Il Yong
• Chung, Hai Bin
• Kim, Bo Woo

status

• published 

publication date

• June 5, 1998

published in

• Proceedings of SPIE - The International Society for Optical Engineering  Journal

presented at event

• 23rd Annual International Symposium on Microlithography  Conference

keywords

• 40 Engineering
• 4006 Communications Engineering
• 4009 Electronics, Sensors and Digital Hardware
• 51 Physical Sciences
• 5102 Atomic, Molecular and Optical Physics

Digital Object Identifier (DOI)

• 10.1117/12.309607

start page

• 511

end page

• 517

volume

• 3331