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General Features of Ion Implantation
Chapters
Overview
Identity
Additional Document Info
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Overview
authors
Mayer, James W
Eriksson, Lennart
Davies, John Arthur
status
published
publication date
1970
Identity
Digital Object Identifier (DOI)
10.1016/b978-0-12-480850-8.50006-4
International Standard Book Number (ISBN) 13
9780124808508
Additional Document Info
start page
1
end page
9