Observation of continuous KrCl excimer fluorescence in microwave discharges employing binary mixtures of Kr and Cl<sub>2</sub>

A novel apparatus was designed to couple 2.45-GHz microwave radiation into a gas discharge. Using this apparatus, continuous-wave 222-nm B → X fluorescence of the KrF excimer system was observed in a binary mixture of chlorine and krypton. The effects of gas composition and total pressure on the fluorescence intensity at a wavelength of 222 nm was investigated. Spectra over the wavelength region of 200–320 nm were recorded for various gas compositions near the optimum total pressures for excimer fluorescence. The 222-nm B → X KrCl excimer transition was apparent in all cases and had a full-width half-maximum (FWHM) of 3 nm. In addition, the 258-nm Cl2 excimer transition was also evident with a FWHM of 5 nm. Both the center frequencies and widths of these transitions were constant for the conditions tested.

Observation of continuous KrCl excimer fluorescence in microwave discharges employing binary mixtures of Kr and Cl₂ Journal Articles