Conference
Imaging, spectroscopy and spectroscopic imaging with an energy filtered field emission TEM
Abstract
Energy filtered microscopy using a post column filter has been applied in a variety of materials characterisation problems to demonstrate its use with a field emission transmission electron microscope. We have shown that the technique, when combined with sample preparation methods such as the focussed ion beam technique, enables the imaging of large fields of view for general analysis and also high resolution mapping so that interfaces and …
Authors
Botton GA; Phaneuf MW
Volume
30
Pagination
pp. 109-119
Publisher
Elsevier
Publication Date
April 1999
DOI
10.1016/s0968-4328(99)00014-1
Conference proceedings
Micron
Issue
2
ISSN
0968-4328