Conference
Characterization of gadolinium and lanthanum oxide films on Si (100)
Abstract
High-resolution transmission electron microscopy, electron energy loss spectroscopy, and Auger electron spectroscopy, were used to study gadolinium and lanthanum oxide films deposited on Si (100) substrates using electron-beam evaporation from pressed-powder targets. As-deposited films consist of a crystalline oxide layer and an amorphous interfacial layer. A complicated distinct multilayer structure consisting of oxide layers, silicate layers, …
Authors
Wu X; Landheer D; Sproule GI; Quance T; Graham MJ; Botton GA
Volume
20
Pagination
pp. 1141-1144
Publisher
American Vacuum Society
Publication Date
May 1, 2002
DOI
10.1116/1.1463079
Conference proceedings
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Issue
3
ISSN
0734-2101