Elemental mapping at the atomic scale using low accelerating voltages

Atomic resolved elemental mapping is demonstrated at 80keV with an aberration-corrected scanning transmission electron microscope on specimens of SrTiO3 and BaTiO3/SrTiO3. The maps were acquired with acquisition times as short as 30ms per pixel (limited by the spectrometer speed), and show very high signal-to-noise ratio and very good detection limits. The features in the elemental maps are interpreted with the help of elastic–inelastic …