Transmission electron microscopy of AIN/TiN superlattice coatings fabricated by pulsed laser deposition Conferences

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authors

Pankov, VV
Prince, RH
Couillard, M
Botton, Gianluigi

status

published

publication date

January 10, 2018

published in

Institute of Physics Conference Series Journal

presented at event

Conference on Microscopy of Semiconducting Materials Conference