Ion Implantation Studies in Silicon Journal Articles

authors

• Eriksson, L
• Davies, John Arthur
• Mayer, JW

status

• published 

publication date

• February 14, 1969

has subject area

• General Science & Technology (Science Metrix)

published in

• Science  Journal

Digital Object Identifier (DOI)

• 10.1126/science.163.3868.627

PubMed ID

• 17742728

start page

• 627

end page

• 633

volume

• 163

issue

• 3868