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Nonequilibrium Phases and Phase Transitions in the...
Chapter

Nonequilibrium Phases and Phase Transitions in the Surface Melt Morphology of Laser Irradiated Silicon

Abstract

The increased use of lasers in material processing is directly related to the coherence of the laser beam. It is the spatial coherence property which allows one to direct and/or focus the modest intensity of laser beams onto small areas of semiconductors, metals or insulators, in such high temperature1 processing applications as annealing and melting, or low temperature2 processing applications, such as catalysis, etching or chemical vapor …

Authors

Preston JS; Sipe JE; Van Driel HM

Book title

Interfaces Under Laser Irradiation

Pagination

pp. 127-136

Publisher

Springer Nature

Publication Date

1987

DOI

10.1007/978-94-017-1915-5_8