Chapter
Nonequilibrium Phases and Phase Transitions in the Surface Melt Morphology of Laser Irradiated Silicon
Abstract
The increased use of lasers in material processing is directly related to the coherence of the laser beam. It is the spatial coherence property which allows one to direct and/or focus the modest intensity of laser beams onto small areas of semiconductors, metals or insulators, in such high temperature1 processing applications as annealing and melting, or low temperature2 processing applications, such as catalysis, etching or chemical vapor …
Authors
Preston JS; Sipe JE; Van Driel HM
Book title
Interfaces Under Laser Irradiation
Pagination
pp. 127-136
Publisher
Springer Nature
Publication Date
1987
DOI
10.1007/978-94-017-1915-5_8