authors Khajavi, Shahrzad Melati, Daniele Cheben, Pavel Schmid, Jens H Xu, Dan-Xia Janz, Siegfried Ye, Winnie N
keywords COUPLER Engineering Engineering, Electrical & Electronic Fabrication Tolerance INTERLEAVED TRENCHES Nano-Antennas Optical Phased Array Optics Physical Sciences Science & Technology Silicon Photonics Surface Grating Technology