Conference
SiO^x, SiN^x, SiN^xO^y Deposited by ICP-CVD System With Optimized Uniformity for Optical Coatings
Authors
Tan X; Wojcik J; Zhang H; Mascher P
Publisher
Optica Publishing Group
Publication Date
January 1, 2007
DOI
10.1364/oic.2007.mb4
Name of conference
Optical Interference Coatings