SiO^x, SiN^x, SiN^xO^y Deposited by ICP-CVD System With Optimized Uniformity for Optical Coatings Conferences

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authors

Tan, Xiaonan
Wojcik, Jacek
Zhang, Haiqiang
Mascher, Peter

status

published

publication date

2007

published in

Optics InfoBase Conference Papers Journal

presented at event

Optical Interference Coatings Conference