Strategy and benefit analysis of water saving in 8" semiconductor fab

This article was introduced the example of water saving in 8-inches semiconductor plant of UMC-8E plant. The technology and strategy was established by the water character, which included the recovery source,POU demand, environmental impact, and running cost. We select the RO as a main unit in recovery system of waste water because the condition of environment and cost can be matched. The process recovery rate can be exceeded 85% after these saving strategy was practiced. This accomplishment was hard to achieved for the old plant, so we obtained the honor of water saving in 2002. ©2004IEEE.