Capacitance Based Scanner for Thickness Mapping of Thin Dielectric Films

We have developed a technique capable of mapping variations in the thickness of thin dielectric films, such as organic photoreceptors. This technique is based on accurately recording the capacitance between a spherical probe and the conductive substrate of a dielectric film. Once the capacitance has been recorded, and assuming the dielectric constant is known, the thickness of the film can be readily extracted. In the current experimental …