Wafer-scale monolithic integration of al2o3:Er 3+ amplifiers with si waveguides

Co-sputtering and structuring active erbium-doped aluminum oxide waveguides directly on top of processed SOI passive waveguides provides coupling losses of 2.5 dB between active and passive waveguides and a signal enhancement of 7.2 dB. ©2010 Optical Society of America.