A new tool for nondestructive monitoring of ion implantation Conferences

authors

• Coleman, PG
• Burrows, CP
• Knights, Andrew
• Gwilliam, RM
• Sealy, BJ
• Goldberg, RD
• Al-Bayati, A
• Foad, M
• Murrell, A

status

• accepted 

publication date

• 2000

published in

• 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)  Journal

presented at event

• 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000  Conference

keywords

• Computer Science
• Computer Science, Hardware & Architecture
• Engineering
• Engineering, Electrical & Electronic
• SPECTROSCOPY
• Science & Technology
• Technology

Digital Object Identifier (DOI)

• 10.1109/.2000.924238

International Standard Book Number (ISBN) 10

• 0-7803-6462-7

start page

• 654

end page

• 657