Physical characterization of residual implant damage in 4H-SiC double implanted bipolar technology Conferences uri icon

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authors

  • Wright, NG
  • Johnson, CM
  • O'Neill, AG
  • Horsfall, A
  • Ortolland, S
  • Adachi, K
  • Phelps, GJ
  • Knights, Andrew
  • Coleman, PG
  • Burrows, CP

publication date

  • January 1, 2001