Electron and atomic force microscopy studies of femtosecond laser machining of Si, GaAs and InP Conferences

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authors

Borowiec, A
MacKenzie, M
Weatherly, GC
Haugen, Harold

status

published

publication date

2001

published in

Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest (IEEE Cat. No.01CH37170) Journal

presented at event

CLEO 2001. Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest Conference