Femtosecond Micromachining of INP: Analysis of Ablation Rates, Morphology and Residual Strain

Summary form only given. We presented detailed results of micromachining of InP with 120 fs, 800 nm pulses, with an emphasis on measuring the ablation rates, groove geometries and residual strain with various machining parameters such as pulse energy, cutting speed and number of consecutive passes. The geometry and morphology of the cuts were analyzed by scanning electron microscopy (SEM) and strain measurements were performed with a degree of polarization technique (DOP).