In-situ monitoring of DC saddle-field plasma-assisted deposition of amorphous silicon and silicon nitride Conferences

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authors

Kruzelecky, RV
Boumerzoug, M
Mascher, Peter
Harry, M
Zukotynski, S

status

published

publication date

January 1, 1992

published in

Proceedings of SPIE - The International Society for Optical Engineering Journal