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Erbium doped silicon rich silicon oxide...
Conference

Erbium doped silicon rich silicon oxide luminescent thin films deposited by ECR-PECVD

Authors

Blakie D; Zalloum OHY; Wojcik J; Irving EJ; Knights AP; Mascher P

Volume

5970

Publisher

SPIE, the international society for optics and photonics

Publication Date

September 28, 2005

DOI

10.1117/12.647885

Name of conference

Photonic Applications in Devices and Communication Systems

Conference proceedings

Proceedings of SPIE--the International Society for Optical Engineering

ISSN

0277-786X