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SPUTTERING OF FROZEN XENON BY kev HEAVY IONS.
Conference

SPUTTERING OF FROZEN XENON BY kev HEAVY IONS.

Abstract

Sputtering measurements of frozen Xe have been made using 20-80 kev heavy ions (N, Ar, Sb and Bi), i. e. where nuclear stopping is the dominant energy loss process. Sputtering yields (Y) of up to 1. 6 multiplied by 10**4 Xe atoms/ion have been obtained. The dependence of Y on the surface deposited (nuclear) energy F//D(O) was found to exhibit two distinct regimes: at low F//D(O) values, Y increases linearly with deposited energy, as predicted …

Authors

Stevanovic DV; Thompson DA; Davies JA

Volume

229 (B1)

Pagination

pp. 315-320

Publication Date

January 1, 1983

Conference proceedings

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Issue

2-3

ISSN

0168-583X