Conference
SPUTTERING OF FROZEN XENON BY kev HEAVY IONS.
Abstract
Sputtering measurements of frozen Xe have been made using 20-80 kev heavy ions (N, Ar, Sb and Bi), i. e. where nuclear stopping is the dominant energy loss process. Sputtering yields (Y) of up to 1. 6 multiplied by 10**4 Xe atoms/ion have been obtained. The dependence of Y on the surface deposited (nuclear) energy F//D(O) was found to exhibit two distinct regimes: at low F//D(O) values, Y increases linearly with deposited energy, as predicted …
Authors
Stevanovic DV; Thompson DA; Davies JA
Volume
229 (B1)
Pagination
pp. 315-320
Publication Date
January 1, 1983
Conference proceedings
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
Issue
2-3
ISSN
0168-583X