The use of an in-situ ECR hydrogen plasma to remove the oxide from InP substrates prior to epitaxial growth Conferences

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authors

Robinson, BJ
Thompson, David Allan
Hofstra, PG
Balcaitis, G
McMaster, SA

status

accepted

publication date

January 1, 1992

published in

LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels Journal

presented at event

LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels Conference