Selective Mn Doping of Thin Film ZnS:Mn Electroluminescent Devices by Laser Photochemical Vapor Deposition

U.V. laser radiation from a krypton ion laser was used to dissociate manganese carbonyl [Mn2(CO)10] at the surface of a ZnS thin film. The resulting Mn deposit was thermally diffused into the film to form a ZnS:Mn thin film electroluminescent (TFEL) device with spatially selective Mn doping. Process parameters and techniques are described as well as electroluminescence measurements on display elements. Finally we suggest applications of this process to future TFEL displays.