Selective Mn Doping of Thin Film ZnS:Mn Electroluminescent Devices by Laser Photochemical Vapor Deposition

U.V. laser radiation from a krypton ion laser was used to dissociate manganese carbonyl [Mn2(CO)10] at the surface of a ZnS thin film. The resulting Mn deposit was thermally diffused into the film to form a ZnS:Mn thin film electroluminescent (TFEL) device with spatially selective Mn doping. Process parameters and techniques are described as well as electroluminescence measurements on display elements. Finally we suggest applications of this …