Micromachines: Principles of Operation, Dynamics, and Control

This paper addresses a comprehensive set of issues related to micromachines in an attempt to qualitatively present forth a complete overview of the field of micro electric machinery. Fundamental concepts of electrostatics and electromagnetics that form the basis and dictate the operation of micromachines are first outlined. Scaling arguments for magnetic micromachines are presented. Principles of operation of both electrostatic and electromagnetic micromachines are explained and a useful form of classification for electrostatic machines is made. The role of microfabrication and its impact on the operation of the micromachine is presented. Finally, the dynamics of micromachines and their control principles are presented. The transient analysis of the micromotor based on its geometrical construction and normal surface forces is also illustrated.