Wafer-level packaging of three-dimensional MOEMS device with lens diaphragm Conferences

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authors

Fang, Qiyin
Lo, Joe F
Qiyin Fang
Marcu, Laura
Eun Sok Kim

status

published

publication date

January 2007

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

presented at event

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Conference