Model identification of the electrohydraulic actuator for Small signal inputs

A prototype of a high-precision hydrostatic actuation system, referred to as the ElectroHydraulic Actuator (EH A), has demonstrated an unprecedented level of accuracy for large load manipulation. This prototype has been able to move an inertial load of 20 Kg with an accuracy of 1 micron, and is currently being modified for sub-micron precision operation. The aim of this paper is to characterize the EHA using an empirical model for operation in …