Boron diffusion in Si, SiGe, and SiGeC Conferences

authors

• Rizk, S
• Haddara, Yaser

status

• accepted 

publication date

• December 1, 2005

published in

• Canadian Conference on Electrical and Computer Engineering  Journal

presented at event

• Canadian Conference on Electrical and Computer Engineering, 2005.  Conference

keywords

• 51 Physical Sciences
• 5104 Condensed Matter Physics

Digital Object Identifier (DOI)

• 10.1109/ccece.2005.1556942

start page

• 344

end page

• 347

volume

• 2005