The application of solid source diffusion in the Vertical Replacement-Gate (VRG) MOSFET Conferences uri icon

  •  
  • Overview
  •  
  • Additional Document Info
  •  
  • View All
  •  

authors

  • Oh, SH
  • Hergenrother, JM
  • Monroe, D
  • Nigam, T
  • Klemens, FP
  • Kornblit, A
  • Mansfield, WM
  • Baumann, FH
  • Gossmann, HJ
  • King, CA
  • Kleiman, Rafael
  • Vuong, HH
  • Weber, GR
  • Rafferty, CS

publication date

  • December 1, 2000