Drift-Free, 1000G Mechanical Shock Tolerant Single-Crystal Silicon Two-Axis MEMS Tilting Mirrors in a 1000×1000-Port Optical Crossconnect

We report drift-free two-axis tilting MEMS mirrors fabricated from single crystal silicon. These micromirrors survive 1000G mechanical shocks and exhibit angular stability better than 4 millidegrees under simulated office vibrations. Two hermetically sealed mirror arrays were used to build a low-loss non-blocking 1000×1000-port optical cross-connect switch. © Optical Society of America.