Single etch grating couplers for mass fabrication with DUV lithography Academic Article uri icon

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authors

  • Halir, R
  • Zavargo-Peche, L
  • Xu, D-X
  • Cheben, Pavel
  • Ma, R
  • Schmid, JH
  • Janz, S
  • Densmore, A
  • Ortega-Moñux, A
  • Molina-Fernández, Í
  • Fournier, M
  • Fédeli, J-M

publication date

  • October 2012