Control and Compensation of Birefringence in SOI Waveguides

In this paper, the theoretical and experimental studies of SOI waveguide birefringence as controlled by cladding stress properties were reported. The experimental birefringence was obtained from array waveguide grating (AWG) demultiplexer /spl Delta//spl lambda/ measurements. A finite element simulator (FEMLAB), to analyse the stress and the corresponding birefringence in SOI ridge waveguides, was used.