authors Benedikovic, Daniel Alonso-Ramos, Carlos Cheben, Pavel Schmid, Jens H Wang, Shurui Xu, Dan-Xia Halir, Robert Ortega-Monux, Alejandro Fedeli, Jean-Marc Janz, Siegfried Molina-Fernandez, Inigo Dado, Milan
keywords Optics Physical Sciences Science & Technology deep-ultraviolet (DUV) lithography electron beam lithography grating coupler refractive index engineering silicon photonics subwavelength grating (SWG)