Conference
Sub-Wavelength Cladding Mid-Infrared Devices
Abstract
Suspended structures enable low loss propagation in silicon waveguides for mid-infrared wavelengths by removing the lossy buried oxide (BOX) layer. We previously demonstrated suspended waveguides with a silicon core and a sub-wavelength grating (SWG) lateral cladding, which allows access to the buried oxide layer for under-etching with hydrofluoric acid. Here we show that bends, multimode interference couplers (MMI) and Mach-Zehnder …
Authors
Penadés JS; Nedeljkovic M; Khokhar AZ; Mashanovich GZ; Ortega-Moñux A; Wangüermert-Pérez G; Halir R; Molina-Fernández I; Cheben P
Pagination
pp. 183-184
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
August 1, 2015
DOI
10.1109/group4.2015.7305897
Name of conference
2015 IEEE 12th International Conference on Group IV Photonics (GFP)