Conference
Out-of-plane total internal reflection coupling mirrors in silicon-on-insulator ridge waveguides
Abstract
We describe the fabrication and performance of out-of-plane coupling mirrors in silicon-on-insulator (SOI) ridge waveguides. The mirrors consisted of a 45° facet formed using directional CAIBE etching through a lithographically defined window.
Authors
Cheben P; Lamontagne B; Post E; Janz S; Xu D-X; Delâge A
Pagination
pp. 146-148
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date
January 1, 2006
DOI
10.1109/group4.2006.1708194
Name of conference
3rd IEEE International Conference on Group IV Photonics, 2006.