Strain analysis of SiGe microbridges Conferences

authors

• Anthony, Ross
• Gilbank, Ashley
• Crowe, Iain
• Knights, Andrew

status

• published 

publication date

• February 22, 2018

published in

• Proceedings of SPIE - The International Society for Optical Engineering  Journal

presented at event

• Silicon Photonics XIII  Conference

keywords

• GE
• Microbridges
• OXIDATION
• Optics
• Physical Sciences
• Raman Spectroscopy
• Science & Technology
• Silicon-Germanium

Digital Object Identifier (DOI)

• 10.1117/12.2288644

volume

• 10537