authors Weyher, JL Lazar, Sorin Macht, L Liliental-Weber, Z Molnar, RJ Müller, S Sivel, VGM Nowak, G Grzegory, I
has subject area 0303 Macromolecular and Materials Chemistry (FoR) 0306 Physical Chemistry (incl. Structural) (FoR) 0912 Materials Engineering (FoR) Applied Physics (Science Metrix)
keywords ATOMIC-FORCE MICROSCOPY COMPLEMENTARY METHODS Crystallography DEFECTS EPITAXIAL LAYERS GALLIUM NITRIDE Materials Science Materials Science, Multidisciplinary NANOPIPES PLAN-VIEW IMAGE Physical Sciences Physics Physics, Applied SEMICONDUCTORS Science & Technology THREADING DISLOCATIONS TRANSMISSION ELECTRON-MICROSCOPY Technology defects etching nitrides