Cu Grain Growth in Damascene Narrow Trenches Conference Paper uri icon

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authors

  • Maitrejean, Sylvain
  • Carreau, Vincent
  • Thomas, Olivier
  • Labat, Stephane
  • Kaouache, Belkhiri
  • Verdier, Marc
  • Lepinoux, Joel
  • Brechet, Yves
  • Legros, Marc
  • Douin, Joel
  • Brandstetter, Stefan
  • Cayron, Cyril
  • Sicardy, Olivier
  • Weygand, Daniel
  • Dubreuil, Olivier
  • Normandon, Philippe

publication date

  • January 1, 2009