Stress induced damages in SiOC and porous SiOC single via Kelvin structures investigation methodology, failure description and improved via barrier approaches Conference Paper uri icon

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authors

  • Fuchsmann, A
  • Arnal, V
  • Besling, W
  • Brechet, Yves
  • Verdier, M
  • Torres, J

publication date

  • January 1, 2004