High-K dielectric deposition in 3D architectures: The case of Ta2O5 deposited with metal–organic precursor TBTDET Conference Paper uri icon

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authors

  • Pinzelli, L
  • Gros-Jean, M
  • Brechet, Yves
  • Volpi, F
  • Bajolet, A
  • Giraudin, J-C

publication date

  • April 2007