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Nanoscopic patterned materials with tunable dimensions via atomic layer deposition on block copolymers
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Overview
authors
Peng, Qing
Tseng, Yu-Chih
Darling, Seth B
Elam, Jeffrey W
status
published
publication date
August 22, 2010
published in
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
Journal
Research
keywords
Chemistry
Chemistry, Multidisciplinary
Physical Sciences
Science & Technology
Additional Document Info
volume
240