Conference
Nanoscopic patterned materials with tunable dimensions via atomic layer deposition on block copolymers
Authors
Peng Q; Tseng Y-C; Darling SB; Elam JW
Volume
240
Publisher
AMER CHEMICAL SOC
Publication Date
August 22, 2010
Conference proceedings
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
ISSN
0065-7727