Conference
A CMOS-compatible rib waveguide with local oxidation of silicon isolation
Authors
Rowe LK; Elsey M; Post E; Tarr NG; Knights AP
Volume
6477
Publisher
SPIE, the international society for optics and photonics
Publication Date
February 8, 2007
DOI
10.1117/12.714641
Name of conference
Silicon Photonics II
Conference proceedings
Proceedings of SPIE--the International Society for Optical Engineering
ISSN
0277-786X