authors Ortolland, S Wright, Nicolas G Johnson, C Mark Knights, Andrew Coleman, Paul G Burrows, CP Pidduck, AJ
has subject area 0306 Physical Chemistry (incl. Structural) (FoR) 0912 Materials Engineering (FoR) Materials (Science Metrix) Nanoscience & Nanotechnology (Science Metrix)
keywords AFM BJT CARBIDE ION-IMPLANTATION Materials Science Materials Science, Characterization & Testing Materials Science, Multidisciplinary PAS Rutherford backscattering spectroscopy (RBS) Science & Technology Technology annealing bipolar transistor implantation