Double Implanted Power MESFET Technology in 4H-SiC Conferences

authors

• Horsfall, Alton B
• Ortolland, S
• Wright, Nicolas G
• Johnson, C Mark
• Knights, Andrew

publication date

• January 1, 2001

has subject area

• 0306 Physical Chemistry (incl. Structural) (FoR)
• 0912 Materials Engineering (FoR)
• Materials (Science Metrix)
• Nanoscience & Nanotechnology (Science Metrix)

published in

• Materials Science Forum  Journal

presented at event

• 3rd European Conference on Silicon Carbide and Related Materials  Conference

keywords

• MESFET
• Materials Science
• Materials Science, Characterization & Testing
• Materials Science, Multidisciplinary
• Science & Technology
• Technology
• annealing
• ion implantation
• roughness

Digital Object Identifier (DOI)

• 10.4028/www.scientific.net/msf.353-356.707

International Standard Book Number (ISBN) 10

• 0-87849-873-7

start page

• 707

end page

• 710

volume

• 353-356