Low loss grating coupled optical interfaces for large volume fabrication with deep ultraviolet optical lithography Conferences uri icon

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authors

  • Alonso-Ramos, Carlos
  • Guerber, Sylvain
  • Pérez-Galacho, Diego
  • Vakarin, Vladyslav
  • Le Roux, Xavier
  • Marcaud, Guillaume
  • Cassan, Eric
  • Marris-Morini, Delphine
  • Cheben, Pavel
  • Boeuf, Frédéric
  • Baudot, Charles
  • Vivien, Laurent
  • Benedikovic, Daniel

publication date

  • May 21, 2018